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next generation sf6 mixture Filling in Nicaragua

next generation sf6 mixture Filling in Nicaragua

next generation sf6 mix Calibration in Nicaragua Inductively coupled plasma (ICP) etching of GaN with high selectivity over Al. 22 Ga. 78 N in BCl 3 /SF 6 mixtures has been studied. Selectivity and surface morphology were investigated over a wide range of pressures (3.75 37.5mTorr), RF powers (30 120 W), ICP powers (100 400 W), and SF 6 /BCl 3

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