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where can I get sf6 n2 Management in Indonesia

where can I get sf6 n2 Management in Indonesia

The reaction products in the SF6-N2 mixture rf plasma during reactive ion etching of Si and W have been measured by a mass spectrometric method. Two kinds of cathode materials were used in this work; they were stainless steel for the Si etching, and SiO2 for the W etching. The main products detected in the etching experiments of Si and W included SF4, SF2, SO2, SOF2, SOF4, SO2F2, NSF, NF3

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